HITACHI 전자현미경
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SU5000

주요특징

  • Max. probe current is 200nA
    - Ultra efficient photodiode BSE Detector, unmatched Low kV imaging to 100 V, and high probe current (>200 nA) for efficient microanalysis.
  • Variable Pressure - Unparalleled low vacuum (10-300 Pa) imaging with the novel Ultra Variable pressure Detector (UVD).
  • Versatile analytical specimen chamber
    - Quick and easy specimen exchange via stage drawer (Max. sample size : 200 mm dia. X 80 mmH) Microanalysis - EDS, WDS and EBSD, etc
  • Ultra-high resolution 3.0 nm at 15kV, 2.0 nm at 1kV
    - Ultra-high resolution is available according to field proven Hitachi's semi-in-lens technique.
  • EM Wizard : Easy of use and Throughput
    - Innovative "EM Wizard" GUI offers point-and-click optimized imaging.
    - Groundbreaking computer-assisted technology offers a new level of SEM operation and control
  • Intuitive user interface
    - Standard mode offers simple and quick operation.
    Novice users are guided step by step and learn along the way thanks to the interactive user guide.

제품사양(Specification)

(1) Resolution
1.2 nm at 30kV / 3.0 nm at 15kV / 3.0 nm at 1kV
2.0 nm at 1kV with deceleration mode
(2) Magnification
10~600,000x (baced on 4" x 5" picture),
30~1,500,000x (1,280x960 pixels on display)
(3) Accelerating voltage
0.5 to 30kV (0.1kV step)
(4) Bias system
> 200nA
(5) Detectors
Everhart Thornley Secondary Electron Detector
(6) Low Vacuum Range
X : 0 ~ 100 mm
Y : 0 ~ 50 mm
Z : 3 ~ 65 mm
T : -20 ~ 90 ˚
R : 360 ˚
(7) Maximum loading sample size : Up to 200mm dia. (200mm dia. : option)
Maximum 80 mm height
(8) Image saving
Max. 5,120 x 3,840 pixels

SU6600

주요특징

  • Max. probe current is 200nA
    - Various application including EDX, WDX, EBSP is used enoughly
  • Low vacuum mode standard built-in (ADAPT function)
    - The useful function in observation and analysis of non-conductive samples is built-in.
    - It's possible to exchange between high vacuum and low vacuum by only GUI controls.
  • Not only HR SE imaging but also BSE imaging from newly high sensitivity detector is observable.
    - Additional ESED detector enables SE imaging in low vacuum.
  • Newly designed specimen chamber and specimen exchange chamber.
    - Large chamber enables to attach EDX/WDX/EBSP and to analysis simultaneously.
    - Max. sample size : 150mm dia. X 40mm H

제품사양(Specification)

(1) Resolution
1.2nm at 30kV / 3.0nm at 1kV (SE in high vacuum)
3.5nm at 30kV (BSE in low vacuum, 10Pa)
(2) Magnification
x10 to x600,000 (continuous)
(3) Accelerating voltage
0.5 to 30kV
(4) 1pA to 200nA
1pA to 200nA
(5) Anode heating system / Aperture heating system (HITACHI patent)
(6) Detectors
Everhart Thornley Secondary Electron Detector
High sensitivity Backscattered Electron Detector
Environmental Secondary Electron Detector (option)
Transmitted Electron Detector (option)
(7) Variable pressure range
10Pa to 300Pa
(8) Vacuum mode change
ADAPT function built-in
(9) Maximum loading sample size
150mm dia. X 40mm H
(10) Image saving
Max. 5,120 x 3,840 pixels

SU-70

주요특징

  • Large probe current of 100nA
    - Probe current up to 100nA available from the newly developed Schottky emission electron source.
  • Versatile analytical specimen chamber
    - Multiple ports have been prepared for large variety of applications.
    - Simultaneous analysis options : EDX, WDX, EBSP, STEM, BSE, CL, Cryo stage, Chamberscope.
  • Field Free mode (FF mode)
    - FF mode for the imaging of magnetic samples and EBSP in a UHR SEM.
  • Ultra-high resolution 1.0nm at 15kV, 1.6nm at 1kV
    - Ultra-high resolution is available according to field proven Hitachi's semi-in-lens technique.
  • Super E x B for controlled SE/BSE signal detection
    - Reduction of charge-up effect in the image and signal filtering.
  • Ultra-low landing voltage for shallow surface observation
    - Beam deceleration technology enables high resolution ultra-low voltage imaging.

제품사양(Specification)

(1) Resolution
1.0nm at 15kV / 1.6nm at 1kV
(2) Magnification
LM mode - x25 to x2,000
HM mode - x100 to x800,000
(3) Accelerating voltage
0.1 to 30kV
(4) Bias system
1pA to 100nA
(5) Anode heating system / Aperture heating system (HITACHI patent)
(6) Detectors
Everhart Thornley Secondary Electron Detector
Backscattered Electron Detector (option)
STEM Detector (option)
(7) Specimen stage
X : 0 to 110mm
Y : 0 to 110mm
Z : 1.5 to 40mm
R : 360˚
T : -5˚ to +70˚
Maximum sample size : 150mm dia. (200mm dia. : option)
(8) Pumping system
I.P x 2 + TMP x 1 + R.P x 1
(9) Image saving
Max. 5,120 x 3,840 pixels