주요특징

• Max. probe current is 200nA
  - Ultra efficient photodiode BSE Detector, unmatched Low kV imaging to 100 V, and high probe current (>200 nA) for efficient microanalysis.
• Variable Pressure - Unparalleled low vacuum (10-300 Pa) imaging with the novel Ultra Variable pressure Detector (UVD).
• Versatile analytical specimen chamber
  - Quick and easy specimen exchange via stage drawer (Max. sample size : 200 mm dia. X 80 mmH) Microanalysis - EDS, WDS and EBSD, etc
• Ultra-high resolution 3.0 nm at 15kV, 2.0 nm at 1kV
  - Ultra-high resolution is available according to field proven Hitachi's semi-in-lens technique.
• EM Wizard : Easy of use and Throughput
  - Innovative "EM Wizard" GUI offers point-and-click optimized imaging.
  - Groundbreaking computer-assisted technology offers a new level of SEM operation and control
• Intuitive user interface
  - Standard mode offers simple and quick operation.
  Novice users are guided step by step and learn along the way thanks to the interactive user guide.

주요특징

• Max. probe current is 200nA
  - Various application including EDX, WDX, EBSP is used enoughly
• Low vacuum mode standard built-in (ADAPT function)
  - The useful function in observation and analysis of non-conductive samples is built-in.
  - It's possible to exchange between high vacuum and low vacuum by only GUI controls.
• Not only HR SE imaging but also BSE imaging from newly high sensitivity detector is observable.
  - Additional ESED detector enables SE imaging in low vacuum.
• Newly designed specimen chamber and specimen exchange chamber.
  - Large chamber enables to attach EDX/WDX/EBSP and to analysis simultaneously.
  - Max. sample size : 150mm dia. X 40mm H

주요특징

• Large probe current of 100nA
  - Probe current up to 100nA available from the newly developed Schottky emission electron source.
• Versatile analytical specimen chamber
  - Multiple ports have been prepared for large variety of applications.
  - Simultaneous analysis options : EDX, WDX, EBSP, STEM, BSE, CL, Cryo stage, Chamberscope.
• Field Free mode (FF mode)
  - FF mode for the imaging of magnetic samples and EBSP in a UHR SEM.
• Ultra-high resolution 1.0nm at 15kV, 1.6nm at 1kV
  - Ultra-high resolution is available according to field proven Hitachi's semi-in-lens technique.
• Super E x B for controlled SE/BSE signal detection
  - Reduction of charge-up effect in the image and signal filtering.
• Ultra-low landing voltage for shallow surface observation
  - Beam deceleration technology enables high resolution ultra-low voltage imaging.