주요특징

• Ultra-high resolution imaging, even at ultra low accelerating voltage (SE resolution 1.3nm at 1.0kV)
• A wide range of signal detection systems
• User-friendly GUI, console and wide-format monitor for comfortable operation
• Wide range of optional accessories to meet customer-specific needs
SU8010 has excellent performance as the entry level model in the SU8000 series. The combination of Semi-in-lens type objective lens and cold FE-gun with small energy spread delivers ultra resolution imaging performance and flexible SE-BSE signal mixing using Hitachi's detector technology for absolute surface information. Z-number contrast and charge suppression.

주요특징

• The ultimate SEM source for high resolution imaging at low acceleration voltage with unmatched beam brightness and stability
• The newly designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability
• Long-term, continuous operation and elemental analysis are now routine with the new CFE source
• The beam decelertion voltage can be optimized to yield a landing voltage of 10-2000V enabling the observation of beam sensitive samples, such as organic materials or polymers, in the natural state without beam damage or sample deformation
• A new selective energy filtering system for the top detector offers fine contrast differentiation even at low accelerating voltages

주요특징

• Superior low-kV performance for observation of beam sensitive materials.
• Next generation Hitachi In-lens SEM optics allows for routine observation at 1 million times.
• Newly designed CFE GUN provides high brightness and extremly stable emission current.
• Improved vacuum technology that allows for ultra-high vacuum levels for reduced sample contamination.
• Highly engineered instrument enclosure featuring both superior strength and stability to allow for high resolution imaging in a broad range of environmental conditions
• Newly designed objective lens provides for high resolution imaging at low acceleration voltage.
• Side entry sample exchange system increases throughput by reducing the time required to change samples and by automatically positioning the sample at the correct WD.